APA (7th ed.) Citation

Downs, M., Turner, N., King, R., & Horsfield, A. Linewidth measurement on photomarks using optical image-shear microscopy ; M. Downs, N. Turner, R. King, A. Horsfield.

Chicago Style (17th ed.) Citation

Downs, M., N. Turner, R. King, and A. Horsfield. Linewidth Measurement on Photomarks Using Optical Image-shear Microscopy ; M. Downs, N. Turner, R. King, A. Horsfield.

MLA (9th ed.) Citation

Downs, M., et al. Linewidth Measurement on Photomarks Using Optical Image-shear Microscopy ; M. Downs, N. Turner, R. King, A. Horsfield.