MEMS design and applications tutorial

Bibliographic Details
Corporate Author: Advenced Semiconductor Devices and Microsystems Smolenice, Slovensko (Author)
Other Authors: Áč, Vladimír (Editor), Weber, Bedřich (Editor)
Format: Conference Proceeding Book
Language:English
PhysicalDescription:50 s. fotogr., tab. 29 cm
Published: Bratislava Trenčín Slovak university of technology Trenčin University of Alexander Dubček [2002]
ISBN:8088914744
Edition:[1. vyd.]
Subjects:
Description
Physical Description:50 s. fotogr., tab. 29 cm
ISBN:8088914744
Bibliography:Bibliogr. odkazy