Voxel-Based Rendering of E-Beam Lithography Processes

Bibliographic Details
Main Authors: Ritomský, Adrian (Author), Benčurová, Anna (Author), Hluchý, Ladislav (Author), Nemec, Pavol (Author), Slížik, Peter (Author), Andok, Robert (Author), Jablonská, Viera (Author)
Format: Article
Language:English