Structural and Electrical Characterisations of Amorphous Silicon Carbide Films Prepared at Different Temperatures

Bibliographic Details
Main Authors: Huran, Jozef (Author), Perný, Milan (Author), Šály, Vladimír, 1956- (Author)
Format: Article
Language:English
ISBN:9788055306469

MARC

LEADER 00000naa a2200000uu 4500
001 vtls010926896
003 SK-MaSNL
005 20260302130626.0
008 210910|2011 xo |||||||||||||||||eng|
015 |a SNBRA 
035 |a (urnnbn)urn:nbn:sk:snk:ar-a0b0j9 
035 |a (uuid)42363a87-2556-464f-ac82-95eba56649cb 
035 |a urn:nbn:sk:snk-aatt4k 
040 |a SNKBUCL  |b slo  |c SNKBUCL  |e AACR2 
041 0 |a eng 
044 |a xo  |c SK 
100 1 |a Huran, Jozef  |4 aut  |9 8594 
245 1 0 |a Structural and Electrical Characterisations of Amorphous Silicon Carbide Films Prepared at Different Temperatures  |c Jozef Huran, Milan Perný, Vladimír Šály 
700 1 |a Perný, Milan  |4 aut  |9 355262 
700 1 |a Šály, Vladimír,  |d 1956-  |4 aut  |9 249971 
773 0 |t ISSE 2011  |d Of Košice : Technical University, 2011  |g S. 252-253  |z 9788055306469 
958 |a OND 
958 |a article11 
958 |a chapter 
999 |c 1301504  |d 1303434