INFLUENCE OF THERMAL ANNEALING ON ELECTRICAL PARAMETERS OF GATE STACK WITH METAL GATE AND BEVELLED THIN OXIDE

Bibliographic Details
Main Authors: Jakabovič, Ján (Author), Fröhlich, Karol (Author), Ťapajna, Milan, 1977- (Author), Benko, Peter (Author)
Format: Article
Language:English
ISBN:9788080707095

MARC

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245 1 0 |a INFLUENCE OF THERMAL ANNEALING ON ELECTRICAL PARAMETERS OF GATE STACK WITH METAL GATE AND BEVELLED THIN OXIDE  |c Ján Jakabovič, Karol Fröhlich, Milan Ťapajna, Peter Benko 
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700 1 |a Ťapajna, Milan,  |d 1977-  |4 aut  |9 238028 
700 1 |a Benko, Peter  |4 aut  |9 269624 
773 0 |t Proceedings of the 13th International Conference on Applied Physics of Condensed Matter  |d Žilina : Žilinská univerzita, 2007  |g S. 153-156  |z 9788080707095 
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