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Silicon oxide films prepared by plasma oxidation of silicon and their application for tunnel MIS diodes

Bibliographic Details
Main Authors: Huran, Jozef (Author), Guldan, A. (Author)
Format: Article
Language:English
PhysicalDescription:Obr. 11. Tb. 1. Res. angl., rus., lit. 7 zázn. v slov., angl.
Subjects:
diódy MIS tunelové
oxidy kremíka
oxidácia plazmová
články z novín a časopisov
Description
Physical Description:Obr. 11. Tb. 1. Res. angl., rus., lit. 7 zázn. v slov., angl.

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