APA (7th ed.) Citation

Szulenyi, F., & Huran, J. Physical properties of plasma deposited silicon nitride layers.

Chicago Style (17th ed.) Citation

Szulenyi, F., and Jozef Huran. Physical Properties of Plasma Deposited Silicon Nitride Layers.

MLA (9th ed.) Citation

Szulenyi, F., and Jozef Huran. Physical Properties of Plasma Deposited Silicon Nitride Layers.

Warning: These citations may not always be 100% accurate.