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Physical properties of plasma deposited silicon nitride layers

Bibliographic Details
Main Authors: Szulenyi, F. (Author), Huran, Jozef (Author)
Format: Article
Language:English
PhysicalDescription:Obr. 6. Tb. 1. Res. rus., angl., lit. 12 zázn. v angl.
Subjects:
nitrid kremíka
povlaky SiN
články z novín a časopisov
Description
Physical Description:Obr. 6. Tb. 1. Res. rus., angl., lit. 12 zázn. v angl.

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