Thin carbon and BN films prepared by RF plasma deposition
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| Format: | Article |
| Language: | Slovak English |
| PhysicalDescription: | Obr. 5. Tb. 2. Res. rus., lit. 17 zázn. v ruš., angl. |
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| Physical Description: | Obr. 5. Tb. 2. Res. rus., lit. 17 zázn. v ruš., angl. |
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