Investigation of BF2+ Implanted Silicon by Capacitance Methods

Bibliographic Details
Main Authors:	Kinder, Rudolf (Author), Harmatha, Ladislav, 1948- (Author)
Format:	Article
Language:	Slovak English
Subjects:	štruktúry MOS kremík reaktancia kapacitná články z novín a časopisov

Description
Physical Description:	Obr. 6, tab. 1, lit. 8 zázn. v angl.
ISSN:	0013-578X

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