Intermixing in immiscible molybdenum/copper multilayered metallization under excimer laser irradiation

Bibliographic Details
Main Authors:	Luby, Štefan, 1941- (Author), Majková, Eva, 1950- (Author), Jergel, Matej, 1954- (Author), D'Anna, E. (Author), Leggieri, G. (Author), Luches, A. (Author), Martino, M. (Author), Valíček, J. (Author)
Format:	Article
Language:	Slovak English
PhysicalDescription:	Obr. 8, tab. 3, lit. 21 zázn. v angl.
ISSN:	0323-0465
Subjects:	štruktúry viacvrstvové Mo/Cu pokovovanie články z novín a časopisov

Description
Physical Description:	Obr. 8, tab. 3, lit. 21 zázn. v angl.
ISSN:	0323-0465

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