Cover Image

The Use of a Four Point Probe for Profiling of Submicron Layers

Bibliographic Details
Main Authors: Kinder, R. (Author), Weber, B. (Author)
Format: Article
Language:Slovak
English
PhysicalDescription:Grafy 3, sch. 2, tab. 1, lit. 10 zázn. v angl., slov.
ISSN:0013-578X
Subjects:
polovodiče
vrstvy tenké Si
články z novín a časopisov
Description
Physical Description:Grafy 3, sch. 2, tab. 1, lit. 10 zázn. v angl., slov.
ISSN:0013-578X

Similar Items