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An automatic measurement system with spreading resistance and PCIV profiling for characterization of semiconductors

Bibliographic Details
Main Authors: Kinder, Rudolf, 1940- (Author), Chmel, Tomáš 1980- (Author), Hulényi, Ladislav, 1938- (Author), Kuruc, Marián, 1979- (Author), Hudec, Ladislav (Author)
Format: Article
Language:Slovak
English
PhysicalDescription:Grafy, sch.
ISSN:1335-3632
Subjects:
polovodiče
meracia technika
automatické meracie systémy
Description
Item Description:Biogr. údaje
Physical Description:Grafy, sch.
ISSN:1335-3632
Bibliography:Bibliogr. odkazy

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