ELECTRICAL PROPERTIES OF NITROGEN RF-SPUTTERED SILICON NITRIDE THIN FILMS: EFFECTS OF GOLD ELECTRODES
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | Slovak English |
Similar Items
ELECTRICAL AND OPTICAL PROPERTIES OF COPPER NITRIDE THIN FILMS PREPARED BY REACTIVE DC MAGNETRON SPUTTERING
by: Mikula, M., et al.
by: Mikula, M., et al.
SERS PROPERTIES OF RF SPUTTERING GOLD NANOPARTICLES ON ZNO:AL
by: Novotny, I., et al.
by: Novotny, I., et al.
Properties of sputtered NiO thin films
by: Hotový, Ivan, 1957-, et al.
by: Hotový, Ivan, 1957-, et al.
R.F. Reactively Sputtered Titanium Nitride Films Applicable to Piezoresistive Pressure Sensors
by: Tvarožek, Vladimír, 1943-, et al.
by: Tvarožek, Vladimír, 1943-, et al.
