Investigation of carbon phases in diamond and diamond-like carbon HF CVD films by Raman spectroscopy

Bibliographic Details
Main Authors:	Kadlečíková, Magdaléna, 1956- (Author), Breza, Juraj, 1951- (Author), Vojačková, Anna (Author), Vojs, Marián (Author), Frgala, Zdeněk (Author), Csabay, Otto, 1937-2013 (Author), Daniš, Tibor, 1978- (Author)
Format:	Article
Language:	English
PhysicalDescription:	Grafy, fotogr.
ISSN:	1335-3632
Subjects:	diamantové povlaky uhlík Ramanova spektroskopia HF CVD technika

INVESTIGATION OF CARBON PHASES IN DIAMOND AND DIAMOND-LIKE CARBON HF CVD FILMS BY RAMAN SPECTROSCOPY by Vojačková, Anna, Breza, Juraj, 1951-, Kadlečíková, Magdaléna, 1956-, Vojs, Marián, Csabay, Otto, 1937-2013, Daniš, Tibor, Frgala, Zdeněk

Source of article: Journal of electrical engineering. - Roč. 55, č. 11-12 (2004), s. [332]-334

Article