Silicon tetrachloride pyrolysis in nitrogen- hydrogen plasma

Bibliographic Details
Main Authors:	Taras, P. (Author), Svoboda, P. (Author)
Format:	Article
Language:	English
Subjects:	dusíková plazma vodíková plazma články z novín a časopisov

Description
Physical Description:	Obr. 5. Res. rus., lit. 4 zázn. v angl.

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