APA (7th ed.) Citation

Luby, Š. Dry Etching for Microelectronics.

Chicago Style (17th ed.) Citation

Luby, Štefan. Dry Etching for Microelectronics.

MLA (9th ed.) Citation

Luby, Štefan. Dry Etching for Microelectronics.

Warning: These citations may not always be 100% accurate.