Jankuj, J. Plasma etching of silicon and its compounds in the freon plasma.
Chicago Style (17th ed.) CitationJankuj, Jiří. Plasma Etching of Silicon and Its Compounds in the Freon Plasma.
MLA (9th ed.) CitationJankuj, Jiří. Plasma Etching of Silicon and Its Compounds in the Freon Plasma.
Warning: These citations may not always be 100% accurate.
