Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films
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| Format: | Book |
| Language: | English German |
| PhysicalDescription: | xiv, 80 s. ilustr. 21 cm |
| Published: |
Aachen
Shaker
2006
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| ISBN: | 3832255222 9783832255220 |
| Series: | Materials chemistry dissertation
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| Subjects: |
Slovenská národná knižnica
| Call Number: |
snkSC 127443 |
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Copy
snkSC 127443 Available for in-library use only |
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