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Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films

Bibliographic Details
Main Author:	Mráz, Stanislav, 1946- (Author)
Format:	Book
Language:	English German
PhysicalDescription:	xiv, 80 s. ilustr. 21 cm
Published:	Aachen Shaker 2006
ISBN:	3832255222 9783832255220
Series:	Materials chemistry dissertation
Subjects:	plazmochémia plazmové striekanie fyzika plazmy odborné publikácie

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