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CHARACTERIZATION OF DOPING PRO...
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CHARACTERIZATION OF DOPING PROFILES IN MBE GROWN SILICON BY ELECTROCHEMICAL CAPACITANCE-VOLTAGE MEASUREMENTS
Bibliographic Details
Main Authors:
Kinder, R.
(Author)
,
Breza, Juraj, 1951-
(Author)
,
Hulényi, L.
(Author)
Format:
Article
Language:
English
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