Application of RIE in processing of photosensitive polyimides for preparation of airbridges

Bibliographic Details
Main Authors:	Unterrainer, K. (Author), Hvoždara, L. (Author), Csabay, Otto, 1937-2013 (Author), Andok, R. (Author)
Format:	Article
Language:	English
ISBN:	8080400237

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