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Optimization of parylene depos...
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Optimization of parylene deposition chamber to achieve high-uniform thin films suitable as a gate dielectric OTFT
Bibliographic Details
Main Authors:
Jakabovič, J.
(Author)
,
Uhrík, J.
(Author)
,
Weis, Martin, 1980-
(Author)
Format:
Article
Language:
English
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