INFLUENCE OF BACKSCATTERED ELECTRONS ON THE QUALITY OF STRUCTURES IN THE THIN RESIST LAYER PATTERNED USING E-BEAM WITH THE GAUSSIAN DISTRIBUTION OF ELECTRON ENERGIES

Bibliographic Details
Main Authors:	Benčurová, A. (Author), Konečníková, A. (Author), Plecenik, A. (Author), Kostič, Ivan, 1955- (Author), Ďurina, P. (Author), Kúš, P. (Author)
Format:	Article
Language:	English

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