SIMS DEPTH PROFILING OF METALLIZATION CONTACT LAYERS FOR AlGaN/GaN HETEROSTRUCTURES

Bibliographic Details
Main Authors: Vincze, A. (Author), Vanko, G. (Author), Bruncko, J. (Author), Držík, M. (Author), Michalka, M. (Author), Vallo, Martin, 1984- (Author), Lalinský, T. (elektrotechnik) (Author)
Format: Article
Language:English