SILICON SURFACE PLASMA ETCHING OPTIMIZATION IN VIEW OF THE RADIATION DEFECT FORMATION

Bibliographic Details
Main Authors:	Abramov, A. (Author), Žiška, Milan, 1952- (Author), Csabay, Otto, 1937-2013 (Author), Slizov, V. (Author), Fallmann, W. (Author)
Format:	Article
Language:	English

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