APA (7th ed.) Citation

Abramov, A., Žiška, M., Csabay, O., Slizov, V., & Fallmann, W. SILICON SURFACE PLASMA ETCHING OPTIMIZATION IN VIEW OF THE RADIATION DEFECT FORMATION.

Chicago Style (17th ed.) Citation

Abramov, A., Milan Žiška, Otto Csabay, V. Slizov, and W. Fallmann. SILICON SURFACE PLASMA ETCHING OPTIMIZATION IN VIEW OF THE RADIATION DEFECT FORMATION.

MLA (9th ed.) Citation

Abramov, A., et al. SILICON SURFACE PLASMA ETCHING OPTIMIZATION IN VIEW OF THE RADIATION DEFECT FORMATION.