ACTIVATION OF THE SILICON SUBSTRATES SURFACE IN LOW TEMPERATURE PLASMA GENERATED AT ATMOSPHERIC PRESSURE

Bibliographic Details
Main Authors:	Zahoranová, Anna (Author), Kováčik, Dušan (Author), Greguš, Ján (Author), Černák, Mirko (Author), Plecenik, Tomáš, 1981- (Author), Medvecká, Veronika, 1987- (Author)
Format:	Article
Language:	English

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