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ACTIVATION OF THE SILICON SUBS...
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ACTIVATION OF THE SILICON SUBSTRATES SURFACE IN LOW TEMPERATURE PLASMA GENERATED AT ATMOSPHERIC PRESSURE
Bibliographic Details
Main Authors:
Zahoranová, Anna
(Author)
,
Kováčik, Dušan
(Author)
,
Greguš, Ján
(Author)
,
Černák, Mirko
(Author)
,
Plecenik, Tomáš, 1981-
(Author)
,
Medvecká, Veronika, 1987-
(Author)
Format:
Article
Language:
English
ISBN:
9788089186716
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ISBN:
9788089186716
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