IDENTIFICATION OF DOMINANT DEFECTS IN NITROGEN-DOPED CZOCHRALSKI-GROWN SILICON USING CAPACITANCE MEASUREMENT TECHNIQUES

Bibliographic Details
Main Authors: Bobula, J. (Author), Harmatha, Ladislav, 1948- (Author), Stuchlíková, Ľubica, 1967- (Author), Ťapajna, Milan, 1977- (Author)
Format: Article
Language:English