AES DEPTH PROFILES OF GaAs/AlGaAs STRUCTURES OBTAINED BY CONVENTIONAL ION SPUTTERING AND WET CHEMICAL ETCHING

Bibliographic Details
Main Authors: Liday, J. (Author), Breza, Juraj, 1951- (Author), Kováč, J. (Author), Vogrinčič, P. (Author), Srnánek, R. (Author), ElGomati, M. M. (Author)
Format: Article
Language:English
ISBN:8022710105