Variations of the temperature field at deposition of multilayer coatings with the vacuum arc evaporation

Bibliographic Details
Main Authors:	Vojevodin, A. A. (Author), Ljubimov, V. V. (Author), Jerochin, A. L. (Author)
Format:	Article
Language:	Slovak
Subjects:	povlaky kovové mnohovrstvové titán nitrid titánu povlakovanie PVD články zo zborníkov

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