HYDROGENATED AMORPHOUS SILICON CARBON NITRIDE FILMS PREPARED BY PECVD TECHNOLOGY: PROPERTIES

Bibliographic Details
Main Authors:	Valovič, Albín (Author), Kleinová, Angela (Author), Kovačová, Eva (Author), Huran, Jozef (Author), Sekáčová, Mária (Author), Kučera, Michal (Author), Boháček, Pavol (Author)
Format:	Article
Language:	English

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