Valovič, A., Kleinová, A., Kovačová, E., Huran, J., Sekáčová, M., Kučera, M., & Boháček, P. HYDROGENATED AMORPHOUS SILICON CARBON NITRIDE FILMS PREPARED BY PECVD TECHNOLOGY: PROPERTIES.
Chicago Style (17th ed.) CitationValovič, Albín, Angela Kleinová, Eva Kovačová, Jozef Huran, Mária Sekáčová, Michal Kučera, and Pavol Boháček. HYDROGENATED AMORPHOUS SILICON CARBON NITRIDE FILMS PREPARED BY PECVD TECHNOLOGY: PROPERTIES.
MLA (9th ed.) CitationValovič, Albín, et al. HYDROGENATED AMORPHOUS SILICON CARBON NITRIDE FILMS PREPARED BY PECVD TECHNOLOGY: PROPERTIES.
Warning: These citations may not always be 100% accurate.


