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a-SiC Thin Film Prepared by PE...
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a-SiC Thin Film Prepared by PECVD Technique
Bibliographic Details
Main Authors:
Buresova, Antonie
(Author)
,
Tischler, Daniel
(Author)
,
Stepanek, Ivo
(Author)
,
Budinská, Zuzana, 1971-
(Author)
Format:
Article
Language:
English
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