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|a 537.311.322
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|a Csabay, Otto,
|d 1937-2013
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|9 13771
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|a Vplyv technologických podmienok prípravy na stabilitu MIS štruktúr
|c Otto Csabay, Daniela Valehrachová
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|b Tb. 2. Sch. 1. Grafy 10. Res. rus., nem., angl., lit. 10 zázn. v slov. a angl.
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|a Valehrachová, Daniela,
|d 1950-
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|9 222924
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|t Elektrotechnický časopis
|g Roč. 33, č. 12 (1982), s. 898-910
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|a Slovenská národná knižnica v Martine
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