Wetting of epitaxial silicium layer and pyrolytic SiO2 layer

Bibliographic Details
Main Authors:	Hrivnáková, V. (Author), Lapčík, Lubomír, 1937-2021 (Author), Fekete, S. (Author), Hebort, Ladislav, 1937- (Author)
Format:	Article
Language:	Slovak English
Subjects:	vrstvy kremíkové epitaxné články z novín a časopisov

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