R.F. Reactively Sputtered Titanium Nitride Films Applicable to Piezoresistive Pressure Sensors

Bibliographic Details
Main Authors:	Tvarožek, Vladimír, 1943- (Author), Novotný, Ivan (Author), Rajniak, Daniel (Author)
Format:	Article
Language:	Slovak English
Subjects:	nitrid titánu pokovovanie piezorezistivne snímače tlaku články z novín a časopisov

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