Deposition of AlN Films by Unbalanced Reactive Magnetron Sputtering

Bibliographic Details
Main Authors:	Búc, Dalibor (Author), Kromka, Alexander (Author), Hotový, Ivan, 1957- (Author), Červeň, Ivan, 1933- (Author)
Format:	Article
Language:	Slovak
Subjects:	vrstvy tenké AlN nitrid hlinitý naprašovanie magnetrónové články z novín a časopisov

Similar Items