Búc, D., Kromka, A., Hotový, I., & Červeň, I. Deposition of AlN Films by Unbalanced Reactive Magnetron Sputtering.
Chicago Style (17th ed.) CitationBúc, Dalibor, Alexander Kromka, Ivan Hotový, and Ivan Červeň. Deposition of AlN Films by Unbalanced Reactive Magnetron Sputtering.
MLA (9th ed.) CitationBúc, Dalibor, et al. Deposition of AlN Films by Unbalanced Reactive Magnetron Sputtering.
Warning: These citations may not always be 100% accurate.


