Deposition of AlN Films by Unbalanced Reactive Magnetron Sputtering
| Main Authors: | , , , |
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| Format: | Article |
| Language: | Slovak |
| PhysicalDescription: | Obr. 5, res. angl., lit. 9 zázn. v angl., slov. |
| ISSN: | 0013-578X |
| Subjects: |
| Item Description: | Životopisné údaje |
|---|---|
| Physical Description: | Obr. 5, res. angl., lit. 9 zázn. v angl., slov. |
| ISSN: | 0013-578X |
