The influence of radiation stimulated gettering on the reliability of silicon device structures

Bibliographic Details
Main Authors: Konakova, R. V. (Author), Sinkevič, V. F. (Author), Pavlenko, A. A. (Author)
Format: Article
Language:Slovak
English
Subjects:
Description
Physical Description:Grafy 2, lit. 4 zázn. v angl., ruš.
ISSN:0013-578X