Auger depth profiling and factor analysis of sputter induced altered layers in SiC

Bibliographic Details
Main Authors:	Kosiba, Rastislav, 1974- (Author), Ecke, Gernot, 1958- (Author), Liday, Jozef (Author), Breza, Juraj, 1951- (Author), Ambacher, Oliver, 1963- (Author)
Format:	Article
Language:	Slovak English
Subjects:	monokryštál SiC Augerova elektrónová spektroskopia karbid kremíka naprašovanie články z novín a časopisov

Similar Items