APA (7th ed.) Citation

Kosiba, R., Ecke, G., Liday, J., Breza, J., & Ambacher, O. Auger depth profiling and factor analysis of sputter induced altered layers in SiC.

Chicago Style (17th ed.) Citation

Kosiba, Rastislav, Gernot Ecke, Jozef Liday, Juraj Breza, and Oliver Ambacher. Auger Depth Profiling and Factor Analysis of Sputter Induced Altered Layers in SiC.

MLA (9th ed.) Citation

Kosiba, Rastislav, et al. Auger Depth Profiling and Factor Analysis of Sputter Induced Altered Layers in SiC.

Warning: These citations may not always be 100% accurate.