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Auger depth profiling and factor analysis of sputter induced altered layers in SiC

Bibliographic Details
Main Authors: Kosiba, Rastislav, 1974- (Author), Ecke, Gernot, 1958- (Author), Liday, Jozef (Author), Breza, Juraj, 1951- (Author), Ambacher, Oliver, 1963- (Author)
Format: Article
Language:Slovak
English
PhysicalDescription:Grafy
ISSN:1335-3632
Subjects:
monokryštál SiC
Augerova elektrónová spektroskopia
karbid kremíka
naprašovanie
články z novín a časopisov
Description
Physical Description:Grafy
ISSN:1335-3632
Bibliography:Bibliogr. odkazy
Res. angl.
Biogr. údaje

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