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Ruthenium oxide films prepared by reactive unbalanced magnetron sputtering

Bibliographic Details
Main Authors: Búc, Dalibor (Author), Mikula, Milan (Author), Music, Denis (Author), Helmersson, Ulf (Author), Jin, Ping (Author), Nakao, Setsuo (Author), Li, Kwok Yan (Author), Shum, Po Wan (Author), Shou, Zhifeng (Author), Čaplovičová, Mária (Author)
Format: Article
Language:Slovak
English
Subjects:
naprašovanie magnetrónové
vrstvy tenké RuO2 > naprašovanie magnetrónové
články z novín a časopisov

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