Ruthenium oxide films prepared by reactive unbalanced magnetron sputtering

Bibliographic Details
Main Authors: Búc, Dalibor (Author), Mikula, Milan (Author), Music, Denis (Author), Helmersson, Ulf (Author), Jin, Ping (Author), Nakao, Setsuo (Author), Li, Kwok Yan (Author), Shum, Po Wan (Author), Shou, Zhifeng (Author), Čaplovičová, Mária (Author)
Format: Article
Language:Slovak
English
Subjects: