Ruthenium oxide films prepared by reactive unbalanced magnetron sputtering

Bibliographic Details
Main Authors:	Búc, Dalibor (Author), Mikula, Milan (Author), Music, Denis (Author), Helmersson, Ulf (Author), Jin, Ping (Author), Nakao, Setsuo (Author), Li, Kwok Yan (Author), Shum, Po Wan (Author), Shou, Zhifeng (Author), Čaplovičová, Mária (Author)
Format:	Article
Language:	Slovak English
PhysicalDescription:	Grafy, obr., tab.
ISSN:	1335-3632
Subjects:	naprašovanie magnetrónové vrstvy tenké RuO2 > naprašovanie magnetrónové články z novín a časopisov

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