Planarization of microelectronic structures by using polyimides

Bibliographic Details
Main Authors:	Matay, Ladislav, 1950- (Author), Andok, Róbert, 1973- (Author)
Format:	Article
Language:	Slovak English
PhysicalDescription:	Grafy, sch., tab.
ISSN:	1335-3632
Subjects:	mikroelektronika > planarizácia > polyimidy polyimidy články z novín a časopisov

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