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Thermodynamic analysis of the GaInAsSb epitaxial layers growth by MOVPE
Bibliographic Details
Main Authors:
Stejskal, Josef 1941-
(Author)
,
Leitner, Jindřich, 1956-
(Author)
,
Voňka, Petr 1946-
(Author)
Format:
Article
Language:
Slovak
English
Subjects:
materiály polovodičové
>
vrstvy epitaxné
>
termodynamika
termodynamika
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