Analysis and prevention of phosphorus contamination during antimony implantation

Bibliographic Details
Main Authors:	Kuruc, Marián (Author), Hulényi, Ladislav, 1938- (Author), Kinder, Rudolf, 1940- (Author), Vincze, Andrej (Author)
Format:	Article
Language:	Slovak English
Subjects:	polovodičové štruktúry iónová implantácia kontaminácia materiálu

Similar Items